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software matlab r2018b version 9.5  (MathWorks Inc)


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    Structured Review

    MathWorks Inc software matlab r2018b version 9.5
    a Surface reaction energy diagram of TMPMCT molecules on the TiO 2 surface calculated by DFT. The structures below correspond to the Path 1. The dotted lines represent the reactions, where TS (transition states) structures were not calculated. Colours: Ti surf (light blue), Ti TMPMCT (yellow green), O surf (red), O TMPMCT (purple), C (brown), H (white pink). The corresponding chemical equations: Phy.: Cp(CH 3 ) 5 Ti(OMe) 3 , Ads.: *-Cp(CH 3 ) 5 Ti(OMe) 3 , 1OMe disso.: *-Cp(CH 3 ) 5 Ti(OMe) 2 + *-(OMe), 2OMe disso.: *-Cp(CH 3 ) 5 Ti(OMe) + 2·*-(OMe), 3OMe disso.: *-Cp(CH 3 ) 5 Ti + 3·*-(OMe). Phy. (Physisorption), Ads. (Adsorption), disso. (dissociation), surf (surface), * refers to adsorbed species. b WCA measurement with various exposure times of TMPMCT on the TiO 2 surface. Fitting of the <t>JMAK</t> <t>model</t> (dashed lines) to the data (points with error bars) obtained from c the growth of subsequent TiO 2 ALD on the TMPMCT inhibitor layer (20, 40 and 60 s), and d selectivity calculated from the thickness measured by ellipsometry. e Areal coverage of TMPMCT on the TiO 2 surface (10 nm × 10 nm) using various impingement numbers calculated by MC simulation and the coverage of TDMAT on the TMPMCT-inhibited surface. f Adsorption mechanism of TMPMCT inhibitor. Unoccupied sites serve as starting points for the nucleation sites of TiO 2 in subsequent ALD cycles. Source data are provided as a Source data file.
    Software Matlab R2018b Version 9.5, supplied by MathWorks Inc, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
    https://www.bioz.com/result/software matlab r2018b version 9.5/product/MathWorks Inc
    Average 90 stars, based on 1 article reviews
    software matlab r2018b version 9.5 - by Bioz Stars, 2026-03
    90/100 stars

    Images

    1) Product Images from "Gradient area-selective deposition for seamless gap-filling in 3D nanostructures through surface chemical reactivity control"

    Article Title: Gradient area-selective deposition for seamless gap-filling in 3D nanostructures through surface chemical reactivity control

    Journal: Nature Communications

    doi: 10.1038/s41467-022-35428-6

    a Surface reaction energy diagram of TMPMCT molecules on the TiO 2 surface calculated by DFT. The structures below correspond to the Path 1. The dotted lines represent the reactions, where TS (transition states) structures were not calculated. Colours: Ti surf (light blue), Ti TMPMCT (yellow green), O surf (red), O TMPMCT (purple), C (brown), H (white pink). The corresponding chemical equations: Phy.: Cp(CH 3 ) 5 Ti(OMe) 3 , Ads.: *-Cp(CH 3 ) 5 Ti(OMe) 3 , 1OMe disso.: *-Cp(CH 3 ) 5 Ti(OMe) 2 + *-(OMe), 2OMe disso.: *-Cp(CH 3 ) 5 Ti(OMe) + 2·*-(OMe), 3OMe disso.: *-Cp(CH 3 ) 5 Ti + 3·*-(OMe). Phy. (Physisorption), Ads. (Adsorption), disso. (dissociation), surf (surface), * refers to adsorbed species. b WCA measurement with various exposure times of TMPMCT on the TiO 2 surface. Fitting of the JMAK model (dashed lines) to the data (points with error bars) obtained from c the growth of subsequent TiO 2 ALD on the TMPMCT inhibitor layer (20, 40 and 60 s), and d selectivity calculated from the thickness measured by ellipsometry. e Areal coverage of TMPMCT on the TiO 2 surface (10 nm × 10 nm) using various impingement numbers calculated by MC simulation and the coverage of TDMAT on the TMPMCT-inhibited surface. f Adsorption mechanism of TMPMCT inhibitor. Unoccupied sites serve as starting points for the nucleation sites of TiO 2 in subsequent ALD cycles. Source data are provided as a Source data file.
    Figure Legend Snippet: a Surface reaction energy diagram of TMPMCT molecules on the TiO 2 surface calculated by DFT. The structures below correspond to the Path 1. The dotted lines represent the reactions, where TS (transition states) structures were not calculated. Colours: Ti surf (light blue), Ti TMPMCT (yellow green), O surf (red), O TMPMCT (purple), C (brown), H (white pink). The corresponding chemical equations: Phy.: Cp(CH 3 ) 5 Ti(OMe) 3 , Ads.: *-Cp(CH 3 ) 5 Ti(OMe) 3 , 1OMe disso.: *-Cp(CH 3 ) 5 Ti(OMe) 2 + *-(OMe), 2OMe disso.: *-Cp(CH 3 ) 5 Ti(OMe) + 2·*-(OMe), 3OMe disso.: *-Cp(CH 3 ) 5 Ti + 3·*-(OMe). Phy. (Physisorption), Ads. (Adsorption), disso. (dissociation), surf (surface), * refers to adsorbed species. b WCA measurement with various exposure times of TMPMCT on the TiO 2 surface. Fitting of the JMAK model (dashed lines) to the data (points with error bars) obtained from c the growth of subsequent TiO 2 ALD on the TMPMCT inhibitor layer (20, 40 and 60 s), and d selectivity calculated from the thickness measured by ellipsometry. e Areal coverage of TMPMCT on the TiO 2 surface (10 nm × 10 nm) using various impingement numbers calculated by MC simulation and the coverage of TDMAT on the TMPMCT-inhibited surface. f Adsorption mechanism of TMPMCT inhibitor. Unoccupied sites serve as starting points for the nucleation sites of TiO 2 in subsequent ALD cycles. Source data are provided as a Source data file.

    Techniques Used: Adsorption

    a Schematic of TMPMCT exposure with an additional H 2 O pulse to improve coverage. b Adsorption energy of hydrolysed TMPMCT species, Cp(CH 3 ) 5 Ti(OMe) 3-x (OH) x (x = 0, 1, 2 and 3), calculated by DFT. c MC simulation results for the adsorption of Cp(CH 3 ) 5 Ti(OMe) 3-x (OH) x with steric hindrance in cases x = 1, 2 and 3. Fitting of the JMAK model to data (points with error bars) obtained from d growth and e selectivity in the case of 20 s TMPMCT with and without additional H 2 O pulse samples. Fitting of the JMAK model to data (points with error bars) obtained from f growth and g selectivity in the case of 40 s TMPMCT with and without additional H 2 O pulse samples. Source data are provided as a Source data file.
    Figure Legend Snippet: a Schematic of TMPMCT exposure with an additional H 2 O pulse to improve coverage. b Adsorption energy of hydrolysed TMPMCT species, Cp(CH 3 ) 5 Ti(OMe) 3-x (OH) x (x = 0, 1, 2 and 3), calculated by DFT. c MC simulation results for the adsorption of Cp(CH 3 ) 5 Ti(OMe) 3-x (OH) x with steric hindrance in cases x = 1, 2 and 3. Fitting of the JMAK model to data (points with error bars) obtained from d growth and e selectivity in the case of 20 s TMPMCT with and without additional H 2 O pulse samples. Fitting of the JMAK model to data (points with error bars) obtained from f growth and g selectivity in the case of 40 s TMPMCT with and without additional H 2 O pulse samples. Source data are provided as a Source data file.

    Techniques Used: Adsorption



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    software matlab r2018b version 9.5  (MathWorks Inc)
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    MathWorks Inc software matlab r2018b version 9.5
    a Surface reaction energy diagram of TMPMCT molecules on the TiO 2 surface calculated by DFT. The structures below correspond to the Path 1. The dotted lines represent the reactions, where TS (transition states) structures were not calculated. Colours: Ti surf (light blue), Ti TMPMCT (yellow green), O surf (red), O TMPMCT (purple), C (brown), H (white pink). The corresponding chemical equations: Phy.: Cp(CH 3 ) 5 Ti(OMe) 3 , Ads.: *-Cp(CH 3 ) 5 Ti(OMe) 3 , 1OMe disso.: *-Cp(CH 3 ) 5 Ti(OMe) 2 + *-(OMe), 2OMe disso.: *-Cp(CH 3 ) 5 Ti(OMe) + 2·*-(OMe), 3OMe disso.: *-Cp(CH 3 ) 5 Ti + 3·*-(OMe). Phy. (Physisorption), Ads. (Adsorption), disso. (dissociation), surf (surface), * refers to adsorbed species. b WCA measurement with various exposure times of TMPMCT on the TiO 2 surface. Fitting of the <t>JMAK</t> <t>model</t> (dashed lines) to the data (points with error bars) obtained from c the growth of subsequent TiO 2 ALD on the TMPMCT inhibitor layer (20, 40 and 60 s), and d selectivity calculated from the thickness measured by ellipsometry. e Areal coverage of TMPMCT on the TiO 2 surface (10 nm × 10 nm) using various impingement numbers calculated by MC simulation and the coverage of TDMAT on the TMPMCT-inhibited surface. f Adsorption mechanism of TMPMCT inhibitor. Unoccupied sites serve as starting points for the nucleation sites of TiO 2 in subsequent ALD cycles. Source data are provided as a Source data file.
    Software Matlab R2018b Version 9.5, supplied by MathWorks Inc, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
    https://www.bioz.com/result/software matlab r2018b version 9.5/product/MathWorks Inc
    Average 90 stars, based on 1 article reviews
    software matlab r2018b version 9.5 - by Bioz Stars, 2026-03
    90/100 stars
    		  Buy from Supplier

    Image Search Results


    a Surface reaction energy diagram of TMPMCT molecules on the TiO 2 surface calculated by DFT. The structures below correspond to the Path 1. The dotted lines represent the reactions, where TS (transition states) structures were not calculated. Colours: Ti surf (light blue), Ti TMPMCT (yellow green), O surf (red), O TMPMCT (purple), C (brown), H (white pink). The corresponding chemical equations: Phy.: Cp(CH 3 ) 5 Ti(OMe) 3 , Ads.: *-Cp(CH 3 ) 5 Ti(OMe) 3 , 1OMe disso.: *-Cp(CH 3 ) 5 Ti(OMe) 2 + *-(OMe), 2OMe disso.: *-Cp(CH 3 ) 5 Ti(OMe) + 2·*-(OMe), 3OMe disso.: *-Cp(CH 3 ) 5 Ti + 3·*-(OMe). Phy. (Physisorption), Ads. (Adsorption), disso. (dissociation), surf (surface), * refers to adsorbed species. b WCA measurement with various exposure times of TMPMCT on the TiO 2 surface. Fitting of the JMAK model (dashed lines) to the data (points with error bars) obtained from c the growth of subsequent TiO 2 ALD on the TMPMCT inhibitor layer (20, 40 and 60 s), and d selectivity calculated from the thickness measured by ellipsometry. e Areal coverage of TMPMCT on the TiO 2 surface (10 nm × 10 nm) using various impingement numbers calculated by MC simulation and the coverage of TDMAT on the TMPMCT-inhibited surface. f Adsorption mechanism of TMPMCT inhibitor. Unoccupied sites serve as starting points for the nucleation sites of TiO 2 in subsequent ALD cycles. Source data are provided as a Source data file.

    Journal: Nature Communications

    Article Title: Gradient area-selective deposition for seamless gap-filling in 3D nanostructures through surface chemical reactivity control

    doi: 10.1038/s41467-022-35428-6

    Figure Lengend Snippet: a Surface reaction energy diagram of TMPMCT molecules on the TiO 2 surface calculated by DFT. The structures below correspond to the Path 1. The dotted lines represent the reactions, where TS (transition states) structures were not calculated. Colours: Ti surf (light blue), Ti TMPMCT (yellow green), O surf (red), O TMPMCT (purple), C (brown), H (white pink). The corresponding chemical equations: Phy.: Cp(CH 3 ) 5 Ti(OMe) 3 , Ads.: *-Cp(CH 3 ) 5 Ti(OMe) 3 , 1OMe disso.: *-Cp(CH 3 ) 5 Ti(OMe) 2 + *-(OMe), 2OMe disso.: *-Cp(CH 3 ) 5 Ti(OMe) + 2·*-(OMe), 3OMe disso.: *-Cp(CH 3 ) 5 Ti + 3·*-(OMe). Phy. (Physisorption), Ads. (Adsorption), disso. (dissociation), surf (surface), * refers to adsorbed species. b WCA measurement with various exposure times of TMPMCT on the TiO 2 surface. Fitting of the JMAK model (dashed lines) to the data (points with error bars) obtained from c the growth of subsequent TiO 2 ALD on the TMPMCT inhibitor layer (20, 40 and 60 s), and d selectivity calculated from the thickness measured by ellipsometry. e Areal coverage of TMPMCT on the TiO 2 surface (10 nm × 10 nm) using various impingement numbers calculated by MC simulation and the coverage of TDMAT on the TMPMCT-inhibited surface. f Adsorption mechanism of TMPMCT inhibitor. Unoccupied sites serve as starting points for the nucleation sites of TiO 2 in subsequent ALD cycles. Source data are provided as a Source data file.

    Article Snippet: The JMAK model was calculated using the Matlab software (Matlab R2018b version 9.5).

    Techniques: Adsorption

    a Schematic of TMPMCT exposure with an additional H 2 O pulse to improve coverage. b Adsorption energy of hydrolysed TMPMCT species, Cp(CH 3 ) 5 Ti(OMe) 3-x (OH) x (x = 0, 1, 2 and 3), calculated by DFT. c MC simulation results for the adsorption of Cp(CH 3 ) 5 Ti(OMe) 3-x (OH) x with steric hindrance in cases x = 1, 2 and 3. Fitting of the JMAK model to data (points with error bars) obtained from d growth and e selectivity in the case of 20 s TMPMCT with and without additional H 2 O pulse samples. Fitting of the JMAK model to data (points with error bars) obtained from f growth and g selectivity in the case of 40 s TMPMCT with and without additional H 2 O pulse samples. Source data are provided as a Source data file.

    Journal: Nature Communications

    Article Title: Gradient area-selective deposition for seamless gap-filling in 3D nanostructures through surface chemical reactivity control

    doi: 10.1038/s41467-022-35428-6

    Figure Lengend Snippet: a Schematic of TMPMCT exposure with an additional H 2 O pulse to improve coverage. b Adsorption energy of hydrolysed TMPMCT species, Cp(CH 3 ) 5 Ti(OMe) 3-x (OH) x (x = 0, 1, 2 and 3), calculated by DFT. c MC simulation results for the adsorption of Cp(CH 3 ) 5 Ti(OMe) 3-x (OH) x with steric hindrance in cases x = 1, 2 and 3. Fitting of the JMAK model to data (points with error bars) obtained from d growth and e selectivity in the case of 20 s TMPMCT with and without additional H 2 O pulse samples. Fitting of the JMAK model to data (points with error bars) obtained from f growth and g selectivity in the case of 40 s TMPMCT with and without additional H 2 O pulse samples. Source data are provided as a Source data file.

    Article Snippet: The JMAK model was calculated using the Matlab software (Matlab R2018b version 9.5).

    Techniques: Adsorption